Technical Leadership

Dr. Temel Büyüklimanli
Senior Director, Quad SIMS

Dr. Büyüklimanli joined Evans East, now Evans Analytical Group in 1994 as a SIMS analyst after being a Research Scientist in the Materials Characterization Laboratory of The Pennsylvania State University, University Park, Pennsylvania, from 1992-1994.  Dr. Büyüklimanli graduated from Middle East Technical University with a BS degree in Physics.  He received his M.S. and Ph.D. degrees from the University of Florida, Departments of Physics and Materials Science & Engineering in 1988 and 1992, respectively. 

Dr. Büyüklimanli has authored several journal articles and given numerous lectures on surface characterization of ceramic and semiconductor materials.  He has worked with other SIMS scientists to develop new analytical techniques to address emerging semiconductor technology needs.  His most significant advances in SIMS protocols include improved accuracy of dopant/impurity and compositional characterization in ULE implants, SiGe and III-V materials.  Recognizing a need and opportunity, Dr. Büyüklimanli led a project that developed proprietary software to perform sophisticated SIMS data processing, which is currently in use at EAG. His current research interests include the development of new or improved SIMS protocols for more accurate characterization of multi-component semiconductor material structures for dopant, impurity, and matrix concentrations and layer thicknesses.