Senior Management

Dr. Patricia M. Lindley
Executive Vice President, Surface Analysis & Materials Characterization

Dr. Lindley has been Executive Vice President, Surface Analysis & Materials Characterization since March 2008. She joined CE&A in 1991 as a Staff Analyst and has advanced through increasingly responsible management positions to her current position. Well versed in a wide range of surface analysis techniques, Dr. Lindley’s particular field of expertise is in TOF-SIMS analysis. Her analytical research has focused on developing polymer and organic applications of TOF-SIMS as well as evaluating clean room contaminants, including airborne contamination that can transfer metals and organic compounds to surfaces. Prior to joining EAG, Dr. Lindley was a Research Chemist and an Officer in the US Air Force for four years. Dr. Lindley received a Ph.D. in Organic Chemistry from the University of Maryland.

Publications

• Analysis of Cleanroom Airborne Molecular Contamination by TOF-SIMS
• Analysis of Submicron AI and AI2O3 Particles by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
• A Review of Analytical Techniques for Process Control of Contaminants Introduced During Ion Implantation
• Chapter 10: Contamination Monitoring and Failure Analysis by TOF-SIMS
• Identifying the Types and Potential Sources of Airborne Molecular Contamination: A multi-Technique Approach
• Imaging Analysis of Polymer Cross Sections by Time-of-Flight Secondary Ion Mass Spectrometry
• Monitoring of Cleanroom Airborne Molecular Contamination by Time-of-Flight SIMS
• Surface Metal Characterization by Time-of-Flight SIMS
• A correlation of TOF-SIMS and TXRF for the Analysis of Trace Metal Contamination on Gallium Arsenide
• TOF-SIMS Analysis of Volatile and Non-Volatile Organic Species on SAW Sensors using a Cold Stage
• Analysis of Organic Contaminants in Gases using Non-Volatile Residue (NVR) Monitors and Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

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