Energy Dispersive X-Ray Spectroscopy, EDS Analysis
Energy Dispersive X-ray Spectroscopy (EDS) is an analytical capability that can be coupled with several applications including Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM).
EDS, when combined with these imaging tools, can provide elemental analysis on areas as small as nanometers in diameter. The impact of the electron beam on the sample produces x-rays that are characteristic of the elements present on the sample. EDS Analysis can be used to determine the elemental composition of individual points or to map out the lateral distribution of elements from the imaged area.
Please click here to learn about EAG's EMview software for SEM, FIB, TEM, and STEM data processing and display.
- Imaging and elemental composition of small areas
- Identification/mapping of elements present in defects
Signal Detected: Characteristic X-rays
Elements Detected: B-U
Detection Limits: 0.1-1at%
Depth Resolution: 0.5-3μm
Imaging/Mapping: Yes
Lateral Resolution/Probe Size: >=0.3μm
- Quick, "first look" compositional analysis
- Versatile, inexpensive, and widely available
- Quantitative for some samples (flat, polished, homogeneous)
- Semi-quantification for samples that are not flat, polished, and homogeneous
- Size restrictions on samples
- Samples must be vacuum compatible (not ideal for wet organic material)
- Analysis (and coating) may spoil subsequent surface analysis
- Limited sensitivity for low-Z elements
- Aerospace
- Automotive
- Biomedical/biotechnology
- Compound Semiconductor
- Data Storage
- Defense
- Displays
- Electronics
- Industrial Products
- Lighting
- Pharmaceutical
- Photonics
- Polymer
- Semiconductor
- Solar Photovoltaics
- Telecommunications
Related Application Notes
- Identification of Foreign Material on Pharmaceutical Tablets
- Chemical Imaging of Pharmaceuticals AN466
- Z-Contrast Imaging and Elemental Analysis of Ultra-thin Films utilizing Scanning Transmission Electron Microscopy (STEM) with Energy Dispersive X-ray Spectroscopy (EDS) AN461
- CdTe Thin Film PV - Application Discussion BR047
- CIGS Thin Film PV - Application Discussion BR045
- Characterization of Surface Contamination BN1365
- Analysis of a 0.2 µm Surface Defect Auger Electron Spectroscopy vs. Energy Dispersive X-ray Spectroscopy AN342
- Analysis of a 0.3 µm Surface Defect Auger Electron Spectroscopy vs. Energy Dispersive X-ray Spectroscopy AN341
- Automated Particle Analysis by SEM/EDS AN379
Related Brochures
- EAGLABS Bubble Chart: Analytical Resolution versus Detection Limit BR004
- Materials Characterization Brochure
- PV Materials Characterization for CIGS BR053
- PV Silicon Impurity Analysis BR025
- LED Brochure BR061
- Electron Microscopy Services BR018
- Materials Characterization for Lithium Ion Battery Technology BR057
- PV Materials Characterization for CdTe BR054
- Typical Applications for Techniques / Periodic Table of Elements BR038
- Amorphous & MicrocrystallineThin Film PV - Application Discussion BR046
- Silicon Wafer PV - Application Discussion BR044
- Your Solution for PV Materials Characterization BR032
- Compound Semiconductors for Optoelectronics - SIMS Analytical Services BR010
- Contamination Analysis for Compound Semiconductors - Analytical Services BR006
- EAG Services Introduction BR011
- EAG Technique Chart BR008
- EAGLABS Scanning Electron Microscopy (SEM)/Energy Dispersive X-ray Spectroscopy (EDS) Services TN108
