Atomic Force Microscopy, AFM Analysis
Atomic Force Microscopy (AFM Analysis), provides images with atomic or near-atomic-resolution surface topography, capable of quantifying surface roughness of samples down to the angstrom-scale. In addition to presenting a surface image, AFM can also provide quantitative measurements of feature sizes, such as step heights and other dimensions. Additionally, magnetic force
microscopy (MFM), which is a variation of AFM, is capable of mapping the magnetic domains of samples.
Examples of Atomic Force Microscopy applications include:
- Assessing wafers (SiO2, GaAs, SiGe, etc.) before and after processing
- Determining processing effects (e.g. plasma treatment) on biomedical devices such as contact lenses, catheter and coated stents.
- Examining the impact of surface roughness on adhesion
- Assessing trench shape/cleanliness on patterned wafers
- Determining whether morphology is the source of surface hazes

- Three-dimensional surface topographic imaging, including surface roughness, grain size, step height, and pitch
- Imaging of other sample characteristics, including magnetic field, capacitance, friction, and phase
Signal Detected: Topography
Vertical Resolution: 0.1Å
Imaging/Mapping: Yes
Lateral Resolution/Probe Size: 15-50Å
- Quantifying surface roughness
- Whole wafer analysis (up to 300mm)
- High spatial resolution
- Imaging of conducting and insulating samples
- Scan range limits: 100µm laterally (xy) and 5µm vertically in z-direction
- Potential problems with extremely rough or oddly shaped samples
- Tip-induced errors are possible
- Aerospace
- Automotive
- Biomedical/biotechnology
- Compound Semiconductor
- Data Storage
- Defense
- Displays
- Electronics
- Industrial Products
- Lighting
- Pharmaceutical
- Photonics
- Polymer
- Semiconductor
- Photovoltaics
- Telecommunications
Related Application Notes
- CdTe Thin Film PV - Application Discussion BR047
- CIGS Thin Film PV - Application Discussion BR045
- AFM: Polymer Surface Modification BN1210
- Biomedical Applications of AFM: Imaging Hydrogel Coatings BN1424
- Detection of Threading Dislocations in Strained Si Using AFM AN409
- High Depth Resolution SIMS of Strained Si in Si/SiGe AN408
- Strained Si - Surface Morphology Measured by AFM AN402
- Characterization Methods for Copper Technology AN192
Related Brochures
- EAGLABS Bubble Chart: Analytical Resolution versus Detection Limit BR004
- Materials Characterization Brochure
- PV Materials Characterization for CIGS BR053
- PV Silicon Impurity Analysis BR025
- PV Materials Characterization for CdTe BR054
- Typical Applications for Techniques / Periodic Table of Elements BR038
- Biomedical Service Brochure BR003
- Your Solution for PV Materials Characterization BR032
- Compound Semiconductors for Optoelectronics - SIMS Analytical Services BR010
- Contamination Analysis for Compound Semiconductors - Analytical Services BR006




