Hydrogen Forward Scattering Spectrometry (HFS)

Hydrogen Forward Scattering Spectrometry (HFS) is an ion scattering technique that uses a modified sample geometry during the analysis to quantitatively profile the hydrogen concentration in thin films. During the process, a He++ ion impinges the sample surface at a glancing angle, knocking the hydrogen atoms out of the sample where they are collected by a solid state detector. A thin foil is used to block any forward scattered He atoms but transmit the forward scattered H atoms.

The ability to measure the composition and distribution of hydrogen content within a thin film can be critical due to the potential impact of hydrogen on a film’s physical properties. Other techniques, such as Auger Electron Spectroscopy (AES), Energy Dispersive X-ray Spectroscopy (EDS), and X-ray Photoelectron Spectroscopy (XPS), cannot detect H atoms; and while SIMS can measure H atoms, quantification of the H concentration by SIMS can be very difficult. This makes HFS an extremely useful technique for thin film analysis.

Very few independent labs offer this unique analytical service, and none can match Evan Analytical Group®’s (EAG) depth and breadth of experience. We routinely analyze a wide range of materials, including very thin films. Plus, you can count on fast turnaround times, accurate data, and person-to-person service, ensuring you understand the analytical test results and what they mean for your material or process.

Ideal Uses for HFS Analysis		Relevant Industries for HFS Analysis
Hydrogen analysis on thin films		Aerospace Defense Displays Semiconductor Telecommunications
Strengths of HFS Analysis		Limitations of HFS Analysis
Non-destructive H composition measurement Whole wafer analysis (150, 200, 300 mm) as well as irregular and large samples Conductor and insulator analysis		Large analysis area (1 mm x 5 mm) Useful information limited to thin films (<0.5 μm) Depth resolution of 300 Angstroms