Focused Ion Bean (FIB) – Circuit Edit

Focused Ion Beam (FIB) circuit edit is a technique where individual conductors can be cut or connected in new ways to modify an integrated circuit. Circuit edits can performed quickly and efficiently, greatly reducing time and expense compared to running a new batch of wafers through a fab. It is an excellent way to validate a design flaw or investigate ways to optimize chip performance.

FIB Circuit Edit employs a finely focused Ga+ ion beam to image, etch and deposit materials on an integrated circuit. The beam 5 nm resolution allows for extremely precise edits to be made. The FIB is coupled to a navigation system (Knights) providing a method to find subsurface features and ensuring that the right edits are made. The high energy Ga beam can mill through conductors and, by utilizing the appropriate gas chemistries, tungsten, platinum or silicon dioxide can be precisely deposited using the ion beam.

FIB edits can be done quickly and easily, at a small fraction of the cost of a new lot of wafers in a fab. Circuit edits are often performed once a design flaw has been identified, to ensure that the proposed fix will solve the complete problem. With our state of the art equipment, we can edit circuits 65 nm technology and mulitple layer metal stacks. Our engineers have many years of experience throughout silicon valley and have the knowledge and capability necessary to accommodate the most demanding requests. FIB edits often require rapid turnaround and cannot afford mistakes- our years of experience and focus on customer satisfaction makes EAG the smart choice in circuit editing.

Ideal Uses for FIB - Circuit Edit		Relevant Industries for FIB - Circuit Edit
Repair mistakes in circuit designs. Repairs include isolating lines and connecting lines. Modify circuit for performance optimization. Modifications on sigulated die or on decapsulated parts.		Si and III-V integrated circuit designers and manufacturers.
Strengths of FIB - Circuit Edit		Limitations of FIB - Circuit Edit
Significantly faster and less expensive than running a new lot through a fab. Able to make multiple modifications to a single circuit. Can test edited part on standard testing equipment.		Backside modifications are time consuming. As geometries get smaller, circuit edits get more challenging.