AES Theory: Introduction

Auger electron spectroscopy (AES) identifies elemental compositions of surfaces by measuring the energies of Auger electrons. Auger electron emission is stimulated by bombarding the sample with an electron beam. The Auger electron energies are characteristic of the elements from which the electrons come. Auger electron spectroscopy is a widespread method for analysis of surfaces, thin films, and interfaces.

Although both are dated, two good reference book are:

• Photoelectron and Auger Spectroscopy, T. A. Carlson (Plenum Press, New York, 1975)
• Methods of Surface Analysis, A. W. Czanderna, ed. (Elsevier, New York, 1975)

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