AES Theory: Uses for AES

Auger electron spectroscopy provides compositional information for many types of surfaces, thin films, and interfaces. Typical samples include both raw semiconductors materials and finished electronic devices. Many of these devices consist of thin layers. For example, AES can distinguish between Si, SiO₂, SiO, and Si₃N₄ in a 10 nm layer on a silicon wafer.

AES analytical volumes down to about 3e-19 cc are possible. It is common to analyze individual small features within finished or partly finished electronic devices. Many other analyses rely on this microanalytical capability for characterizing heterogeneous materials. For example, Auger analyses of failed materials are common. The fractured surfaces of a broken piece of steel might be examined for the presence of unusual elements such as lead at metal grain boundaries. In contrast to AES, less finely focused microanalytical techniques provide only average concentrations from larger analytical volumes.

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