EAG Online Tutorials

Working Smarter™ with Surface Analytical Techniques

EAG offers six online tutorials that provide in-depth information on the theory and instrumentation in three key materials characterization techniques: Secondary Ion Mass Spectrometry (SIMS), Rutherford Backscattering Spectrometry (RBS), and Auger Electron Spectrometry (AES).

SIMS

Secondary ion mass spectrometry (SIMS) involves bombarding a sample surface with a primary ion beam followed by mass spectrometry of the emitted secondary ions. Today, SIMS is widely used for analyzing trace elements in solid materials, especially semiconductors and thin films. Typical SIMS instruments use either a duoplasmatron or a surface ionization primary ion source (or both).

Begin SIMS Theory tutorial>>
Begin SIMS Instrumentation tutorial>>

RBS

Rutherford Backscattering (RBS) is based on collisions between atomic nuclei. Analysts measure the number and energy of ions in a beam that have backscattered after colliding with atoms in the near-surface region of a tested sample. RBS is ideally suited for determining the concentration of trace elements that are heavier than the major constituents of the substrate.

Begin RBS Theory tutorial>>
Begin RBS Instrumentation tutorial>>

AES Theory

Auger electron spectroscopy (AES) identifies elemental surface compositions by measuring the energies of the Auger electrons, which are characteristic of their original elements. AES is used widespread for surface analysis, thin film analysis, and interface analysis.

Begin AES Theory tutorial>>
Begin AES Instrumentation tutorial>>