SIMS Theory: Secondary Ion Energy Distributions

The sputtering process produces secondary ions with a range of (translational) kinetic energies. The energy distributions are distinctly different for atomic and molecular ions. Molecular ions have relatively narrow translational energy distributions because they have kinetic energy in internal vibrational and rotational modes whereas atomic ions have all kinetic energy in translational modes. The following figure shows typical energy distributions for mono, di, and triatomic ions.

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